[IEEE International Electron Devices Meeting - Washington,...

[IEEE International Electron Devices Meeting - Washington, DC, USA (10-13 Dec. 1995)] Proceedings of International Electron Devices Meeting - Embedded micromechanical devices for the monolithic integration of MEMS with CMOS

Smith, J.H., Montague, S., Sniegowski, J.J., Murray, J.R., McWhorter, P.J.

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Year:

1995

Language:

english

DOI:

10.1109/IEDM.1995.499295

File:

PDF, 740 KB

english, 1995

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