Diamond-like Carbon Coating Made by RF Plasma Enhanced Chemical Vapour Deposition for Protective Antireflective Coatings on Germanium
Varade, Ashish, Krishna, Ankit, Reddy, K. Niranjan, Chellamalai, M., Shashikumar, P.V.Volume:
5
Year:
2014
Journal:
Procedia Materials Science
DOI:
10.1016/j.mspro.2014.07.390
File:
PDF, 852 KB
2014