[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Si/CoSi/sub 2//Si[100] heteroepitaxial growth by molecular beam epitaxy and novel solid phase epitaxy

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