A Study on Carbon-Nanotube Local Oxidation Lithography...

A Study on Carbon-Nanotube Local Oxidation Lithography Using an Atomic Force Microscope

Kumar, Kitu, Sul, Onejae, Strauf, Stefan, Choi, Daniel S., Fisher, Frank, Prasad, Marehalli G., Yang, Eui-Hyeok
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Volume:
10
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2010.2086474
Date:
July, 2011
File:
PDF, 556 KB
english, 2011
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