R&D on novel sensor routing and test structure...

R&D on novel sensor routing and test structure development

K.-H. Hoffmann, G. Auzinger, T. Bergauer, M. Dragicevic, J. Erfle, P. Grabiec, M. Grodner, S. Hänsel, F. Hartmann, E. Huemer, W. Kiesenhofer, K. Kucharski, J. Marczewski, G. Steinbrück, M. Valentan
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Volume:
628
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.nima.2010.06.333
File:
PDF, 1.25 MB
english, 2011
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