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On the Use of Structural Vibrations to Release Stiction Failed MEMS
Savkar, Amit A., Murphy, Kevin D., Leseman, Zayd C., Mackin, Thomas J., Begley, Matthew R.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.885986
Date:
February, 2007
File:
PDF, 1.00 MB
english, 2007