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Nonlinear Dynamics Modeling of Correlated Functional Process Variables for Condition Monitoring in Chemical–Mechanical Planarization
Wang, Hui, Zhang, Xi, Kumar, Ashok, Huang, QiangVolume:
22
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2011180
Date:
February, 2009
File:
PDF, 1.39 MB
english, 2009