Multipoint alignment monitoring with amorphous silicon...

Multipoint alignment monitoring with amorphous silicon position detectors in a complex light path

J. Alberdi, P. Arce, J.M. Barcala, E. Calvo, A. Ferrando, M.I. Josa, A. Molinero, J. Navarrete, J.C. Oller, C. Yuste, A. Calderón, G. Gómez, F.J. González-Sánchez, C. Martínez-Rivero, F. Matorras, T.
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Volume:
624
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2010.09.008
File:
PDF, 656 KB
english, 2010
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