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[IEEE 2012 International Conference on Wavelet Analysis and Pattern Recognition (ICWAPR) - Xian, China (2012.07.15-2012.07.17)] 2012 International Conference on Wavelet Analysis and Pattern Recognition - Correction of SEM image distortion based on non-equidistant GM(1,1) model
Chen, Xi, Han, Hua, Xie, Qi-Wei, Shen, Li-JunYear:
2012
Language:
english
DOI:
10.1109/icwapr.2012.6294748
File:
PDF, 1.95 MB
english, 2012