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Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applications
Bhusari, D., Reed, H.A., Wedlake, M., Padovani, A.M., Allen, S.A.B., Kohl, P.A.Volume:
10
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.946793
Date:
January, 2001
File:
PDF, 205 KB
english, 2001