Electrothermal Microgripper With Large Jaw Displacement and...

Journal of Microelectromechanical Systems 2008 / 12 Vol. 17; Iss. 6

Electrothermal Microgripper With Large Jaw Displacement and Integrated Force Sensors

Chu Duc, Trinh, Lau, Gih-Keong, Creemer, J. Fredrik, Sarro, Pasqualina M.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.2007268
Date:
December, 2008
File:
PDF, 998 KB
english, 2008
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