Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2011 Vol. 645; Iss. 1
Electron optics of multi-beam scanning electron microscope
A. Mohammadi-Gheidari, P. KruitVolume:
645
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.nima.2010.12.090
File:
PDF, 814 KB
english, 2011