Electron optics of multi-beam scanning electron microscope

Electron optics of multi-beam scanning electron microscope

A. Mohammadi-Gheidari, P. Kruit
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Volume:
645
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.nima.2010.12.090
File:
PDF, 814 KB
english, 2011
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