Correction to “A General Methodology to Predict the...

Journal of Microelectromechanical Systems 2009 / 12 Vol. 18; Iss. 6

Correction to “A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices”

Fitzgerald, Alissa M., Pierce, David M., Huigens, Brent M., White, Carolyn D.
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Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2035674
Date:
December, 2009
File:
PDF, 40 KB
english, 2009
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