![](/img/cover-not-exists.png)
[IEEE 2013 IEEE International Conference on Automation Science and Engineering (CASE 2013) - Madison, WI, USA (2013.08.17-2013.08.20)] 2013 IEEE International Conference on Automation Science and Engineering (CASE) - Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools
Zhu, QingHua, Wu, NaiQi, Qiao, Yan, Zhou, MengChuYear:
2013
Language:
english
DOI:
10.1109/coase.2013.6653915
File:
PDF, 562 KB
english, 2013