A round robin characterisation of the thickness and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 227; Iss. 3

A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

N.P. Barradas, N. Added, W.M. Arnoldbik, I. Bogdanović-Radović, W. Bohne, S. Cardoso, C. Danner, N. Dytlewski, P.P. Freitas, M. Jakšić, C. Jeynes, C. Krug, W.N. Lennard, S. Lindner, Ch. Linsmeier, Z.
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Volume:
227
Year:
2005
Language:
english
Pages:
23
DOI:
10.1016/j.nimb.2004.08.021
File:
PDF, 595 KB
english, 2005
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