[IEEE 2005 6th International Conference on Electronics Packaging Technology - Shenzhen, China (30 Aug.-2 Sept. 2005)] 2005 6th International Conference on Electronic Packaging Technology - Strength Reliability for Surfaces micro-machined Polycrystalline silicon Micro-Cantilevers
Jiang Li-li,, Tang Jie-ying,Year:
2005
Language:
english
DOI:
10.1109/icept.2005.1564631
File:
PDF, 162 KB
english, 2005