Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 230; Iss. 1-4
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Radiation enhanced diffusion of implanted platinum in silicon guided by helium co-implantation for arbitrary control of platinum profile
Pavel Hazdra, Jan VobeckýVolume:
230
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2004.12.045
File:
PDF, 244 KB
english, 2005