[IEEE 2012 International Conference on Optoelectronics and Microelectronics (ICOM) - Changchun, Jilin, China (2012.08.23-2012.08.25)] 2012 International Conference on Optoelectronics and Microelectronics - The effect of argon plasma cleaning on the surface characteristics of GaAs substrate
Wang, Yunhua, Zhou, Lu, Jia, Baoshan, Bai, Duanyuan, Yang, Xu, Gao, Xin, Bo, BaoxueYear:
2012
Language:
english
DOI:
10.1109/icoom.2012.6316205
File:
PDF, 1.18 MB
english, 2012