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[IEEE 5th International Conference on Properties and Applications of Dielectric Materials - Seoul, South Korea (25-30 May 1997)] Proceedings of 5th International Conference on Properties and Applications of Dielectric Materials - Lithographic properties of SiN/sub x/ and Se/sub 75/Ge/sub 25/ thin films as the low-energy ion-beam resist
Hyun-Yong Lee,, Hong-Bay Chung,Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/icpadm.1997.616515
File:
PDF, 388 KB
english, 1997