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Improved High-Temperature Leakage in High-Density MIM Capacitors by Using a TiLaO Dielectric and an Ir Electrode
Cheng, C. H., Pan, H. C., Yang, H. J., Hsiao, C. N., Chou, C. P., McAlister, S. P., Chin, AlbertVolume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2007.909612
Date:
December, 2007
File:
PDF, 216 KB
english, 2007