Development of a secondary-electron ion-microscope for...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 231; Iss. 1-4

Development of a secondary-electron ion-microscope for microbeam diagnostics

G. Garty, G. Randers-Pehrson, D.J. Brenner
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Volume:
231
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.01.035
File:
PDF, 309 KB
english, 2005
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