Fabrication of a free standing resolution standard for...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 231; Iss. 1-4

Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions

J.A. van Kan, P.G. Shao, P. Molter, M. Saumer, A.A. Bettiol, T. Osipowicz, F. Watt
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Volume:
231
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.01.052
File:
PDF, 331 KB
english, 2005
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