Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 231; Iss. 1-4
A progress review of proton beam writing applications in microphotonics
A.A. Bettiol, T.C. Sum, F.C. Cheong, C.H. Sow, S. Venugopal Rao, J.A. van Kan, E.J. Teo, K. Ansari, F. WattVolume:
231
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2005.01.084
File:
PDF, 488 KB
english, 2005