Rapid direct micromachining of PTFE using MeV ions in an...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 231; Iss. 1-4

Rapid direct micromachining of PTFE using MeV ions in an oxygen rich atmosphere

G.W. Grime, C.J. Sofield, I. Gomez-Morilla, R. Gwilliam, M.D. Ynsa, O. Enguita
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Volume:
231
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.01.086
File:
PDF, 287 KB
english, 2005
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