Proton beam fabrication of nickel stamps for nanoimprint...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 231; Iss. 1-4

Proton beam fabrication of nickel stamps for nanoimprint lithography

K. Ansari, P.G. Shao, J.A. van Kan, A.A. Bettiol, F. Watt
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Volume:
231
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.01.091
File:
PDF, 339 KB
english, 2005
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