Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 231; Iss. 1-4
Proton beam micromachining on strippable aqueous base developable negative resist
I. Rajta, E. Baradács, M. Chatzichristidi, E.S. Valamontes, I. Uzonyi, I. RaptisVolume:
231
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.01.094
File:
PDF, 215 KB
english, 2005