New developments on the Surrey microbeam applications to...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 231; Iss. 1-4

New developments on the Surrey microbeam applications to lithography

P. Mistry, I. Gomez-Morilla, G.W. Grime, R. Webb, C. Jeynes, R. Gwilliam, A. Cansell, M. Merchant, K.J. Kirkby
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Volume:
231
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.01.095
File:
PDF, 426 KB
english, 2005
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