Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 231; Iss. 1-4
Determination of local lattice tilt in Si1−xGex virtual substrate using high resolution channeling contrast microscopy
H.L. Seng, T. Osipowicz, J. Zhang, E.S. Tok, F. WattVolume:
231
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.01.098
File:
PDF, 404 KB
english, 2005