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[IEEE 1998 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (16-17 June 1998)] 1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) - Implementation experience of automated guided vehicle system in an IC foundry fab around SMIF environment
Tseng-Hsiang Yang,, Li-Ren Lin,, Kuo-Hsiang Hsu,, Chen, T.Year:
1998
Language:
english
DOI:
10.1109/smtw.1998.722698
File:
PDF, 470 KB
english, 1998