[IEEE 2010 IEEE International Reliability Physics Symposium - Garden Grove (Anaheim), CA, USA (2010.05.2-2010.05.6)] 2010 IEEE International Reliability Physics Symposium - The TDDB failure mode and its engineering study for 45nm and beyond in porous low k dielectrics direct polish scheme
Hsu, Chia-Lin, Lu, Kuan-Ting, Lin, Wen-Chin, Lin, Jeh-Chieh, Chen, Chih-Hsien, Tsai, Teng-Chun, Huang, Climbing, Wu, J Y, Perng, Dung-ChingYear:
2010
Language:
english
DOI:
10.1109/irps.2010.5488707
File:
PDF, 449 KB
english, 2010