Development of electron beam ion source for nanoprocess...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 235; Iss. 1-4

Development of electron beam ion source for nanoprocess using highly charged ions

Makoto Sakurai, Fumiharu Nakajima, Takunori Fukumoto, Nobuyuki Nakamura, Shunsuke Ohtani, Shinro Mashiko, Hiroyuki Sakaue
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Volume:
235
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.03.236
File:
PDF, 224 KB
english, 2005
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