Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 237; Iss. 1-2
Angled implants for controlling gate–source/drain extension: A TCAD modeling study
Sunderraj Thirupapuliyur, Amir Al-Bayati, Amitabh Jain, Abhilash MayurVolume:
237
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.04.085
File:
PDF, 204 KB
english, 2005