Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 237; Iss. 1-2
High-dose V+ implantation in ZnO thin film structures
A.F. Vyatkin, V.I. Zinenko, Yu.A. Agaphonov, A.N. Pustovit, D.V. Roshchupkin, F. Reuss, C. Kirchner, R. Kling, A. WaagVolume:
237
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.04.097
File:
PDF, 119 KB
english, 2005