New developments in the applications of proton beam writing

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 237; Iss. 1-2

New developments in the applications of proton beam writing

P. Mistry, I. Gomez-Morilla, G.W. Grime, R.P. Webb, R. Gwilliam, A. Cansell, M. Merchant, K.J. Kirkby, E.J. Teo, M.B.H. Breese, A.A. Bettiol, D.J. Blackwood, F. Watt
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Volume:
237
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.04.099
File:
PDF, 252 KB
english, 2005
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