Influence of co-implantation on the activation and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 237; Iss. 1-2

Influence of co-implantation on the activation and diffusion of ultra-shallow extension implantation

Marc Herden, Daniel Gehre, Thomas Feudel, Andy Wei, Massimo Bersani, Giovanni Mannino, Jaap v.d. Berg
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Volume:
237
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.04.101
File:
PDF, 251 KB
english, 2005
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