New method of Plasma doping with in-situ Helium...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 237; Iss. 1-2

New method of Plasma doping with in-situ Helium pre-amorphization

Y. Sasaki, C.G. Jin, K. Okashita, H. Tamura, H. Ito, B. Mizuno, H. Sauddin, R. Higaki, T. Satoh, K. Majima, Y. Fukagawa, K. Takagi, I. Aiba, S. Ohmi, K. Tsutsui, H. Iwai
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Volume:
237
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.04.109
File:
PDF, 164 KB
english, 2005
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