Investigation of strain-relaxed SiGe thin film grown on...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 239; Iss. 4

Investigation of strain-relaxed SiGe thin film grown on ion-implanted Si compliant substrate

Changchun Chen, Benhai Yu, Jiangfeng Liu, Jianqing Cao, Dezhang Zhu, Zhihong Liu
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Volume:
239
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2005.04.119
File:
PDF, 347 KB
english, 2005
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