Ion tracks developed in polyimide resist on Si wafers as...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 240; Iss. 3

Ion tracks developed in polyimide resist on Si wafers as template for nanowires

Marek Skupinski, Marcel Toulemonde, Mikael Lindeberg, Klas Hjort
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Volume:
240
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.nimb.2005.04.128
File:
PDF, 348 KB
english, 2005
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