Composition, structure and properties of SiNx films...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 240; Iss. 3

Composition, structure and properties of SiNx films fabricated by pulsed reactive closed-field unbalanced magnetron sputtering

Zh.Q. Yao, P. Yang, N. Huang, H. Sun, G.J. Wan, Y.X. Leng, J.Y. Chen
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Volume:
240
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.nimb.2005.06.004
File:
PDF, 470 KB
english, 2005
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