Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2005 Vol. 240; Iss. 1-2
Characterization of ablation plasma ion implantation
F. Belloni, D. Doria, A. Lorusso, V. Nassisi, L. Torrisi, L. Calcagnile, G. Quarta, D. Bleiner, D. MannoVolume:
240
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.06.084
File:
PDF, 125 KB
english, 2005