Swift heavy ion beam induced recrystallization of amorphous...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 Vol. 240; Iss. 1-2

Swift heavy ion beam induced recrystallization of amorphous Si layers

P.K. Sahoo, T. Som, D. Kanjilal, V.N. Kulkarni
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Volume:
240
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2005.06.123
File:
PDF, 255 KB
english, 2005
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