Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 242; Iss. 1-2
![](/img/cover-not-exists.png)
Formation of zinc-oxide nanoparticles in SiO2 by ion implantation combined with thermal oxidation
H. Amekura, K. Kono, N. Kishimoto, Ch. BuchalVolume:
242
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.08.019
File:
PDF, 183 KB
english, 2006