Self-assembled nano-scale multilayer formation using...

Self-assembled nano-scale multilayer formation using physical vapor deposition methods

C. Ronning, I. Gerhards, M. Seibt, H. Hofsäss, Wan-Yu Wu, Jyh-Ming Ting
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Volume:
242
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.08.032
File:
PDF, 213 KB
english, 2006
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