Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 242; Iss. 1-2
Self-assembled nano-scale multilayer formation using physical vapor deposition methods
C. Ronning, I. Gerhards, M. Seibt, H. Hofsäss, Wan-Yu Wu, Jyh-Ming TingVolume:
242
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2005.08.032
File:
PDF, 213 KB
english, 2006