Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 242; Iss. 1-2
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Modelling of ion implantation in SiC crystals
Ivan Chakarov, Misha TemkinVolume:
242
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2005.08.090
File:
PDF, 217 KB
english, 2006