Current research topics and applications of gas cluster ion...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 242; Iss. 1-2

Current research topics and applications of gas cluster ion beam processes

Isao Yamada, Noriaki Toyoda
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Volume:
242
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2005.08.111
File:
PDF, 89 KB
english, 2006
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