Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 242; Iss. 1-2
Effect of positive pulses on the microstructure and mechanical properties of diamond-like carbon films deposited by PBII
Junho Choi, Soji Miyagawa, Setsuo Nakao, Masami Ikeyama, Yoshiko MiyagawaVolume:
242
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2005.08.113
File:
PDF, 93 KB
english, 2006