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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - An optimized rapid thermal processor for GaAs annealing
Li Wu-Xia,, Liu Xun-Chun,, Wang Su-Qin,, Wang Run-Mei,, Luo Ming-Xiong,, Zhang Long-Hai,Volume:
2
Year:
2001
Language:
english
DOI:
10.1109/ICSICT.2001.982154
File:
PDF, 155 KB
english, 2001