Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 242; Iss. 1-2
Application of high energy ion beam for the control of boron diffusion
Lin Shao, M. Nastasi, Phillip E. Thompson, Quark Y. Chen, Jiarui Liu, Wei-Kan ChuVolume:
242
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2005.08.191
File:
PDF, 185 KB
english, 2006