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[IEEE 2007 IEEE International Conference on Integrated Circuit Design and Technology - Austin, TX, USA (2007.05.30-2007.06.1)] 2007 IEEE International Conference on Integrated Circuit Design and Technology - Mechanisms for Junction Degradation of Advanced MOSFETs Induced by Plasma Processing
Kamei, Masayuki, Eriguchi, Koji, Okada, Kenji, Ono, KouichiYear:
2007
Language:
english
DOI:
10.1109/icicdt.2007.4299553
File:
PDF, 2.63 MB
english, 2007