Exploring the sheet resistance variation with various beam...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 Vol. 244; Iss. 2

Exploring the sheet resistance variation with various beam current densities in low-energy ion implantation

Yi-Sheng Lai, J.S. Chen, H.L. Sun, Z.B. Chen, C.T. Tien, S.Y. Yeh, C.W. Chen, F.S. Lee, Y.S. Ho, P.Y. Hsu, H.H. Wu, J.H. Wang, C.M. Yang
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Volume:
244
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2005.10.028
File:
PDF, 204 KB
english, 2006
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